Delta DTDM High-Precision Modular Temperature Controller

Brand
Delta
Model number
DTDM

Modular controller for semiconductor process tools: ±0.1% measurement, 10 ms sampling, up to 32 PID loops and 128 I/O channels per group, cascade and feed-forward control, and EtherCAT via DTDM-ECAT.

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Key features

  • Modular Design, Flexible Expansion: Up to 32 PID loops & 128 input/output channels
  • PID Cascade Control: Dual-loop control shortens response time
  • Feed-Forward Control: Temperature compensation for known disturbances
  • Linearization Table: Eliminate temperature reading error due to sensor nonlinearity
  • Multi-Loop Control: Uses a single input value to control multiple channels
  • Status Database & Logic Operation: Fast response time & reducing computing load for host computer
  • Multi-Channel PV Comparison & Alarm: Avoid significant temperature differences for a stable temperature
  • Input Switch-Over & Redundancy: Creating a more accurate and reliable temperature control system
  • EtherCAT Communication: Fast communication & easy integration